Low Particle Poppet Valves
Low Particle(LP) poppet valve was field tested and proven to improve yield in a harsh or corossive environment such as Etch or CVD processes. The entire mechanisms are shielded and completely cleared from gas flow, thus creating a very clean environment. Can be installed upstream of the chamber if necessary. Sizes available in 1.0″, 1.5″ and 2.0″. To specify LP style, add -LP at the end of part number. Example: AVP-KF25-LP.
- Vacuum range: 1 x 10-9 Torr
- Leak test: 1 x 10-9 atm cc/sec of He
- Bake temperature: 120oC
- MTTF (life): 1,500,000 Cycle
- Time from open-close: < 0.5 sec
- Operating temperature: 20o to 100oC
- Differential pressure: 15 psi
- Position Indicator: 28 VDC or 115 VAC
- Operating pressure: 60 – 95 psi
Pneumatic Stainless Low Particle Poppet Valve
For Product Selection and Quote:
Please call: 800-215-1438
Or send RFQ to info@apexvacuum.com