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Gate Valves

Our gate valves provide linear motion control for demanding vacuum and process applications. Available in Standard configuration for full-bore on/off service with tight sealing, and Throttling design for accurate flow adjustment and precise pressure control across a wide range of operating conditions.

INDUSTRIAL | SEMICONDUCTOR | HARSH ENVIRONMENT | ALUMINUM | COMPACT
 

Standard

Throttling

Industrial

Plug-in compatible with standard valves; easily replace valves in the field. Ultra clean for use in a clean vacuum environment.

Available in:

Manual and Pneumatic configuration
Flanges in KF, ISO, and CF configuration
Manual valve size up to 6 in; Pneumatic size up to 24 in

Manual

Pneumatic

Manual

Pneumatic

  • Vacuum range: 1 x 10-9  Torr
  • Leak test: 1 x 10-9 atm cc/sec of He
  • Bake temperature:  80-120 oC Fluctuating
  • Life: 100,000 Cycle
  • Seal: Viton (FKM)
  • Time from open-close: < 1.5 sec
  • Position Indicator: 28 VDC or 115 VAC
  • Material: Stainless Steel

Pneumatic Industrial Gate Valve

* Flanges are also available in ISO-K, CF HV
* Subject to change without notice

Manual Industrial Gate Valve

* Flanges are also available in ISO-K, CF HV
* Subject to change without notice

Semiconductor

Plug-in compatible with standard valves; easily replace valves in the field. Ultra clean for use in a clean vacuum environment.
For more information on the semiconductor gate valves we offer, please click here.

Available in:

Manual and Pneumatic configuration
Flanges in KF, ISO, and CF configuration
Manual valve size up to 6 in; Pneumatic size up to 24 in

Manual

Pneumatic

Manual

Pneumatic

  • Vacuum range: 1 x 10-10  Torr
  • Leak test: 1 x 10-10 atm cc/sec of He
  • Bake temperature:  200 oC
  • Life: 250,000 Cycle
  • Time from open-close: < 1.5 sec
  • Position Indicator: 28 VDC or 115 VAC
  • Material: Stainless Steel

Pneumatic Semi Gate Valve

* Flanges are also available in ISO-K, CF HV
* Subject to change without notice

Manual Semi Gate Valve

* Flanges are also available in ISO-K, CF HV
* Subject to change without notice

Harsh Environment

Designed for harsh and dirty environment such as MOCVD, ALD, or PECVD in presence of corrosive chemical and high temperature. Corrosive condensate can cause failure in bearing and linkages. Easy cleaning or replacement.

Available in:

  • Pneumatic configuration
  • Flanges in KF, ISO, and CF configuration
  • Valve size available from 3″ to 6″
 

Pneumatic

  • Vacuum range: 8 x 10-9  Torr
  • Leak test: 1 x 10-9  atm cc/sec of He
  • Bake temperature:  150 oC
  • Life: 250,000 Cycle
  • Seal: Viton (FKM)
  • Operating temperature: 100 to 150oC
  • Position Indicator: 28 VDC or 115 VAC

Pneumatic Harsh Environment Gate Valve

* Subject to change without notice

Aluminum

High quality aluminum Gate Valve that the body is machined from a solid block, resulting in better rigidity and strength. Light weight design. Position indicator optional.

Available in:

  • Manual and Pneumatic configuration
  • Flanges in KF, ISO, and CF configuration
  • Manual valve size up to 6 in; Pneumatic size up to 24 in

Pneumatic

  • Vacuum range: 8 x 10-9  Torr
  • Leak test: 1 x 10-9  atm cc/sec of He
  • Bake temperature:  100 oC
  • Life: 250,000 Cycle
  • Time from open-close: < 1.5 sec
  • Operating temperature: up to 100oC
  • Position Indicator: 28 VDC or 115 VAC
  • Material: Aluminum

Pneumatic Aluminum Gate Valve

* Subject to change without notice

Manual

  • Vacuum range: 8 x 10-9  Torr
  • Leak test: 1 x 10-9  atm cc/sec of He
  • Bake temperature:  100 oC
  • Life: 250,000 Cycle
  • Time from open-close: < 1.5 sec
  • Operating temperature: up to 100oC
  • Position Indicator: 28 VDC or 115 VAC
  • Material: Aluminum

Manual Aluminum Gate Valve

* Subject to change without notice

Compact Gate Valve

A substitude for gate valve at a fraction of the cost. This valve has very few parts with only one axis motion, thus extremely robust. Available in manual and electrical version. The electrical version is a throttling valve with unlimited positions to control the flow. Ideal application for loadlock chamber to avoid turbulance.

Features and Benefits:

  • Reliable, robust
  • secure locking in closed position on both gate sides
  • Actuator solenoid available in AC or DC
  • Reliable performance
  • Extended maintenance free cycle

Available in:

  • Manual and Electrical configuration
  • Flanges in KF

Manual

  • Vacuum range: 1 x 10-7  Torr
  • Leak test: 1 x 10-9 mbar ls-1
  • Bake temperature: 100 oC
  • Seal: Viton O-ring
  • Life: 50,000 Cycle
  • Mounting Position: Any
  • Voltage | Current:  50 VAC/DC | 0.1 A
  • Solenoid: 24 VDC, 5.4W

Mini Gate Valve Electrical

* Subject to change without notice

  • Vacuum range: 1 x 10-7  Torr
  • Pressure range: 2 ATM
  • Leak test: 1 x 10-9 mbar ls
  • Bake temperature: 120 oC
  • Seal: Viton O-ring
  • Life: 1M Cycle

Toggle Gate Valve

* Subject to change without notice

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